PV-Reflectometer: a Process Monitoring Tool for Solar Cell Manufacturing
نویسندگان
چکیده
A new instrument is described for in-line monitoring of various process steps in silicon solar-cell fabrication. This system can rapidly measure a host of parameters that describe the front-surface and the back-surface properties of a wafer/cell. The measured parameters represent values averaged over the entire wafer/cell, making it suitable for monitoring process steps in a solar cell manufacturing facility.
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تاریخ انتشار 2001